MicroWriter ML3 Pro
The MicroWriter ML3 Pro is a direct-write photolithography machine for rapid prototyping.
The ML3 Pro can write features down to 400nm into photoresists over a 195mm x 195mm x 15mm area.
- 195mm x 195mm maximum writing area
- 230mm x 230mm x15mm maximum wafer size
- 0.4µm, 0.6µm, 1µm, 2µm and 5µm minimum sizes across full writing area
- 365nm light source
- XY interferometer with 1nm resolution for precise motion control
- Writing speeds - up to: 17mm²/minute (0.6µm minimum feature size), 50mm²/minute ( 1µm minimum feature size),120mm²/minute (2µm minimum feature size) and 180mm²/minute ( 5µm minimum feature size)
- Auto focus system using yellow light with real-time surface tracking laser - no minimum wafer size