Nanofabrication Equipment

 

Lithography

• UV Exposure Station and Aligner
• MicroWriter ML3 Pro

Metrology 

• Ellipsometers (UV-NIR and IR)
• Atomic Force Microscope (AFM)
• Scanning Electron Microscope (SEM)
• NIR-UV-VIS Spectrophotometer
• Near- Field Scanning Microscope (neaSNOM)
• Optical Microscope
• Analytic Probe
• Contact Profilometer
• Optical Profilometer 

Processing 

• Plasma Asher
• Hot Plate Station
• Ovens
• Plasma Etching ( Deep Reactive Ion Etching)
• Rapid Thermal Processing & Annealing (RTA)
• Denton Plasma Coating
• Chemical Hoods
• Wedge Bonder

Deposition 

• E-Beam Evaporator
• Dual Chamber Sputterer