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LSU  Office of Research and Economic Development


Nanofabrication Facility

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    • Spring 2023/ Chemical Engineering 4420

Nanofabrication Equipment

 

 

Lithography

 
  • UV Exposure Station and Aligner
  • MicroWriter ML3 Pro

Metrology 

  • Ellipsometer
  • Reflectometer
  • Atomic Force Microscope (AFM)
  • Scanning Electron Microscope (SEM)
  • NIR-UV-VIS Spectrophotometer
  • Near- Field Scanning Microscope (neaSNOM)
  • Optical Microscope
  • Analytic Probe
  • Contact Profilometer
  • Optical Profilometer 

Processing 

  • Plasma Asher
  • Hot Plate Station
  • Ovens
  • Plasma Etching ( Deep Reactive Ion Etching)
  • Rapid Thermal Processing & Annealing (RTA)
  • Denton Plasma Coating
  • Chemical Hoods
  • Wedge Bonder

Deposition 

  • E-Beam Evaporator
  • Dual Chamber Sputterer

 

 

LSU

Louisiana State University
Baton Rouge, Louisiana 70803

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The J. Bennett Johnston, Sr.
Center for Advanced Microstructures and Devices
6980 Jefferson Highway
Baton Rouge, Louisiana, 70806
225-578-8887
225-578-6954 FAX

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