Kurt Lesker CMS-18 Dual Chamber Sputterer
The Kurt Lesker CMS-18 sputtering system is composed of two independent chambers with a shared load-lock enabling versatile film depositions.
Key Features:
- Customizable automatic deposition recipes
- (3) deposition guns on each chamber
- Dedicated chambers for metals and insulators to reduce cross - contamination
- RF and DC magnetron sputtering
- Substrate RF bias
- Substrate heating up to 800°C
- Up to (3) process gases, allowing reactive sputtering
Contact Sergi Lendinez for more information