Kurt Lesker CMS-18 Dual Chamber Sputterer



The Kurt Lesker CMS-18 sputtering system is composed of two independent chambers with a shared load-lock enabling versatile film depositions. 

Key Features:

  • Customizable automatic deposition recipes
  • (3) deposition guns on each chamber
  • Dedicated chambers for metals and insulators to reduce cross - contamination
  • RF and DC magnetron sputtering
  • Substrate RF bias
  • Substrate heating up to 800°C
  • Up to (3) process gases, allowing reactive sputtering

Contact Sergi Lendinez for more information