Tencor P2 Long Scan Contact Profilometer
The Tencor Profiler is a metrology tool that generates a 2 dimensional profile of the surface of a sample. This is done by a stylus, which touches the surface of a sample and is scanned across a prescribed length. Step heights and widths of structure can be measured in this way. Measurement of vertical features ranging from under 100 Å (0.4 µin) to approximately 0.3 mm (11 mils), with a vertical resolution of 1 or 25 Å (0.004 or 0.1 µin)
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