Reflectometer- AFT 210XP Nanospec



The Nanometrics 210XP is a spectrophotometer used for the determination of resist film thickness on Silicon.  It scans through a range of wavelengths and determines the thickness of the film based on the reflectance of the light.

Nanospec Tutorial

Tool Capabilities

  • Wavelength range: ~ 370 - 800 nm
  • Measurable thickness range: ~ 100 A - 50 um
  • Typical films measured:  oxide, nitride, polysilicon, positive and negative resists, thick and thin films, and polyimide
  • Substrate:  Silicon