The NFF provides state-of-the-art instruments for designing, fabricating, characterizing and testing of complex nano and microscale structures and devices. The NFF is housed within a 2500 square feet ISO-5 cleanroom inside the experimental hall at CAMD. The facility is open to all LSU and external (industry) researchers.  Cleanroom staff support is available for training, process consultation and collaboration on new process development. Visit the How to become a user page for more details.

Cleanroom Events

March 2022

Rapid Thermal Processing capabilities now available with the installation of the Jipelec JetFirst RTP/RTA

January 2022

The neaSpec Scanning Near-Field Optical Microscope is now operational. The microscope combines nanoscale imaging and spectroscopy all in one tool

October 2021

Kurt J. Lesker Dual Chamber Sputtering System installation completed

August 2021

The Temescal E-beam Evaporator upgrade completed with new controls that allow multi-layer deposition and automatic rate control.  A new dry pump and cryopump were added to improve pump down time. Deposition materials available: Au, Cr, Cu, In, Ni, Pt and Ti

News

Nanofabrication Facility featured in LSU Chemical Engineering promo video

 

 

 

LSU Engineering Faculty collaborate on the development of water treatment systems for private wells using UV light

Louisiana Board of Regents awards grant to expand the role of Plasma Etching at LSU into the 21st century. The Oxford 100 ICP/RIE tool will undergo enhancements to the current system while incorporating new plasma etching capabilities currently not offered in the state of Louisiana

The NFF welcomes Dr. Sergi Lendinez, Assistant Director 

LSU Faculty awarded NSF grant acquiring a Near-Field Optical Microscope

NFF director Prof. Kevin McPeak secures near $1 Million Louisiana Board of Regents Departmental Enhancement Grant

Research group discover alloy beneficial for miliary operations using Spectroscopic Ellipsometer data