Micromachining X-ray Lithography

Micromachining (XRLM1) Port 2A, 10 mrad (Updated)

  • X-ray lithography beamline for microfabrication.
  • Two mode of operation, "white" and "mirror" light.
  • Two Beryllium windows, 100 µm and 120 µm.
  • Distance source point - mask plane 10.35 meter.
  • DEX 02 scanner, from Jenoptik GmbH.

IR, Vacuum UV, & Soft X-ray

3-meter Normal Incidence Monochromator (NIM), Port 3B, 70 mrad

  • High-resolution, high-flux beamline, range 2 - 50 eV,
    resolving power 10,000 (high energy) - 50,000 (low energy)
  • Dedicated SES-200 analyzer endstation for ARUPS measurement.
  • A “second tail” allows deflection of the highly resolved monochromatic beam to a second, user-selected or provided, endstation.
  • View High Resolution Photoemission of Organic Systems at 3m NIM Beamline at CAMD for more details.

Dr. Cherice Evans Blog using NIM for research

Varied-Line-Space Plane Grating Monochromator Beamline (VLSPGM), Port 4A, 7 mrad

ex. of research done on the PGM beamline: surface science.

5-meter Toroidal Grating Monochromator Beamline (5m-TGM), Port 4B, 6 mrad

Infrared Microspectroscopy Beamline (IR), Port 1A, 50 mrad


Protein Crystallography MAD Beamline (GCPCC)

  • Energy range 7.0 - 17.5 keV with resolution of 3 eV, suitable for macromolecular crystallography MAD phasing.

Tomography Beamline

  • Energy range 6.0 - 35 keV with resolution 1-3%

SAXS - Small Angle X-ray Scattering Beamline

  • Double-crystal monochromator with energy range from ~5-11KeV
  • Online 200mmx200mm multiwire gas detector
  • Sample to detector distance adjustable from 0.9m to 4.9m
  • View SAXS for further details.

X-ray Absorption Spectroscopy Beamlines

  • LEXAS: Low Energy X-ray Absorption Spectroscopy
    Energy range: 1.7 - 5 keV
  • DCM: Double Crystal Monochromator Beamline
    Energy range: 1.7 - 11 keV
  • HEXAS: High Energy X-ray Absorption Spectroscopy
    Energy range: 5 - 30 keV
  • View X-ray Absorption Spectroscopy (XAS) for further details.

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Louisiana State University
Center for Advanced Microstructures & Devices
6980 Jefferson Hwy.
Baton Rouge, LA 70806
(225) 578-8887 Tel. (main office)
(225) 578-6954 Fax


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