Microfabrication Research Highlights

Metal Containing Diamond-Like Carbon (DLC) Deposition System (pdf)
Funded by the Board of Regents Enhancement Program CAMD researchers have built and commissioned a more versatile DLC system suitable for large sample sizes and enabling deposition of DLC, metal(s)/ ceramic(s) and/or metal/ceramic containing films.

Milli-fluidic Reactor for Catalyst Research (pdf)
Miniaturization of laboratory processes offers advantages including increased speed of analysis, parallel screening, well-defined and repeatable experimental conditions. Jointly with partners at LSU’s Energy Frontier Research Center for Atomic-Level Catalyst Design CAMD staff is building micro- and millifluidic systems for systematic studies new catalytic and nano-materials.

Microfluidic Development Platform for Nanowire-based BioSensor Applications (pdf)
The LA Board of Regents awarded the Advanced Materials Research Institute (AMRI) at the University of New Orleans along with its partners, the LSU’s Health Science Center (LSUHSC) in New Orleans and LSU-CAMD (CAMD) in Baton Rouge, funds to developing advanced materials and packaging solutions for Bio-sensor devices.

HAR Microfluidic Device to Concentrate Microalgae (pdf)
With funding from USDA (SBIR phase-I grant) CAMD staff and engineers from Phycal Inc. conducted research fabricating and testing an innovative, patented lateral displacement array (LDA) design for Algae dewatering applications.


Heat Load Experiment
Heat Load Experiments at CAMD and CLS (pdf)
Thermal load and its impact on the patterning accuracy in deep X-ray lithography has been the focus of research jointly performed from staff at the Canadian Lightsource and CAMD. Systematic studies, modelling and in-situ monitoring of temperature changes during exposures were discussed and guidelines for successful exposures at high power sources are derived.

Hydrodynamic Focusing Micropump Module with PDMS/Nickel Particle Composite Diaphragms for Microfluidic Systems (pdf)

A multi-fluidic speed-modulating (MFSM) micropump combined with Tesla valves and hydrodynamic focusing micro-fluidic channels was designed, fabricated, and tested. The membrane is made from a PDMS/Ni-particle composite (PNPC) diaphragm and deflection is obtained by an external pneumatic force as well as an external magnetic field. J. Kim, LSU Master Thesis

Characterization of Biocompatible Parylene-C Coatings for BIOMEMS Applications (pdf)
Parylene uses a room temperature chemical vapor deposition (CVD) technique to deposit uniform films onto a wide range of substrates. In the present study Parylene films were deposited on different HARMS substrates and characterized in regard to conformability, pinhole free property, surface modification, and biocompatibility. Q. Nguyen, LSU Master Thesis

Combinatorial Multilevel Mold Insert Using Micromachining and X-ray Lithography (pdf)
Research focus was the fabrication of a PMMA mold insert template containing multi-level microstructures with smallest features of 10μm and aspect ratios up to 50 using a process combination of micromilling and x-ray lithography. O. Jinka, LSU Master Thesis


BESSY Soft Xray
Soft X-Ray Lithography for High-Aspect Ratio Sub-Micrometer Structures (pdf)
In this joint collaboration between Helmholtz-Zentrum Berlin (HZB) and CAMD soft x-ray lithography is used for patterning ultra-precise, low and high aspect ratio micro- and nanostructures taking advantage of a new, negative-tone, epoxy-based, high contrast x-ray resist. 1 µm thick SiN membrane mask with a ~1 µm thick Au absorber were transferred into up to 10 µm thick resist with structures down to about 500 nm. 

Negative Resists for Ultra-Tall, High Aspect Ratio Microstructures (pdf)

Collaborators at HZB and CAMD studied the fabrication of ultra-tall, high-aspect ratio microstructures patterned into two new negative resists using deep X-ray lithography (DXRL). Research results on critical properties including sensitivity, contrast, and dimensional accuracy were compared to PMMA resist. Both resists showed very good dimensional accuracy with diameter variations less than 1µm over a process area of 80mm for 1mm tall structures. A broad process window was demonstrated, which can be used to fine-tune the sidewall verticality as well as structure dimensions.

SUEX Dry Film Resist – A new Material for High Aspect Ratio Lithography (pdf)
SUEX epoxy Thick Dry Film Sheets (TDFS) are a promising material developed by DJDevCorp for a wide range of MEMS applications. Patterning is possible with both UV and X-ray lithography as well as a combination of lithography and hot embossing. This enables the fabrication of multi-level, complex designs as well as high aspect ratio MEMS (HARMS) components.

Opportunities for SUEX dry laminate resist in microfluidic MEMS applications (pdf)
Microfluidics applications can benefit from a dry film approach in the preparation of multi-layer, multi-level fluidic channels and structures on patternable substrates and covers. Of special benefit is the extreme simplicity in the use of the dry film sheets employing a standard lamination approach providing uniform coatings with no edge bead and no solvent gradient through the film.