The Microfabrication staff provides expertise in processing, photolithography, thin film deposition, electroplating, and metrology. Microfabrication equipment has the capability to generate sub-micron structures in optical photoresist, based on the User's design, for creation of molds or x-ray masks. Optical masks with features as small as five micrometers are realized with the Mann pattern generator. Thin films can be deposited for many different metal layers through e-beam or sputter deposition. SEM analysis, interferometric capabilities, thermal analyses, and scanning tip measurements provide a variety of metrological tools for use by trained researchers.