The hot plate station is comprised of four Prazitherm precision hot plates manufactured for resist processing. Each hot plate is sized 350mm x 350mm. They are flat and level, with temperature uniformity of +/- 0.5º. The maximum operating temperature is limited to 200ºC in order to maintain temperature inside the cleanroom. A hood located over the hot plate station ensures evaporated fumes are not released into the cleanroom environment.
Each hot plate is controlled through its own PID controller with a PC using iTools© software by Eurotherm. The programmable software allows for controlled and automated heating and cooling cycles, though there is no active cooling associated with the hot plates. Each controller has 4 recipes, with 16 segments available for programming each recipe.
Hot Plate Standard Operating Procedures: