The M206 oven is dedicated to CAMD staff use only.
Located next to the spinners, the M326 oven is availabe to External Users.
The vacuum oven is controlled by a Eurotherm 2604 PID controller. The controller is optionally PC interfaced for recipe storage and remote control. The two independent shelves with ramp control make it valuable for SU-8 processing. Additionally, nitrogen is optional for a non-oxidizing environment during baking.
This oven has a Watlow 982 controller for temperature control during ramp and dwell periods. This machine is dedicated to CAMD staff use only.